Synthesis of layers, coatings or films using precursor layer exerted pressure containment
US6500733B1 · kind B1 · utility
87Cited by
17References
9Claims
0Family size
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Key dates
| Filing date | Sep 20, 2001 |
| Grant date | Dec 31, 2002 |
| Priority date | — |
| Expiry date | Sep 20, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/1111
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Systems and methods are described for synthesis of films, coatings or layers using precursor exerted pressure containment. A method includes exerting a pressure between a first precursor layer that is coupled to a first substrate and a second precursor layer that is coupled to a second substrate; forming a composition layer; and moving the first substrate relative to the second substrate, wherein the composition layer remains coupled to the second substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.