Patent · US Expired

Optical waveguide coupler and method for producing same

US6501885B2 · kind B2 · utility

2Cited by
6References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 10, 2001
Grant dateDec 31, 2002
Priority date
Expiry dateJan 10, 2021

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B6/125
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

The optical waveguide coupler comprises a structure (1) of a number of elongated narrow optical waveguide strips (2), which consist respectively of a front area (3), a center area (4) and a coupling area (5). The center area (4) has respective transition areas (6) and (7) to the corresponding area (3) or (5). A gap (9) in the front areas (3) provided between two adjoining strips (2) is larger than the thickness of the narrow strips (2). The front faces (8) of the front areas (3), and the front faces of the coupling areas (5) are embodied to be as smooth as possible, wherein all strips form a stack in the coupling area (5). The gaps are pits which result from etching of an Si substrate with the aid of a DRIE etching process.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.