Optical waveguide circuit
US6501896B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 28, 2001 |
| Grant date | Dec 31, 2002 |
| Priority date | — |
| Expiry date | Sep 28, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/132
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention relates to an optical waveguide circuit such as an arrayed waveguide grating, etc. A lower cladding is formed on a silicon substrate. A core having the following waveguide construction is formed thereon. That is, an input side slab waveguide is connected to the emission side of a plurality of incidence waveguides, a plurality of arrayed waveguides having different lengths form each other are juxtaposed at and connected to the emission side thereof, an output side slab waveguide is further connected to the emission side thereof, and a plurality of emission waveguides are connected to the emission side thereof, thereby causing the abovementioned waveguide construction. The upper cladding covers up the core. The cladding and core are made of silica-based glass, wherein the value B of birefringence occurring in said optical waveguide portion is |B|≦5.34×10−5, and &agr;s−2.0×10−7≦&agr;g ≦&agr;s+2.0×10−7 is established where it is assumed that the thermal expansion coefficient of the upper cladding is &agr;g, and the thermal expansion coefficient of a silicon substrate is &agr;s.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.