Pod door to port door retention system
US6502869B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 14, 1998 |
| Grant date | Jan 7, 2003 |
| Priority date | — |
| Expiry date | Jul 14, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T292/1083
- WIPO fieldCivil engineering
- WIPO sectorOther fields
Abstract
A system is disclosed for ensuring that the pod door is firmly and securely retained on the port door of a process tool as the pod door is removed from the pod and stowed in the process tool during workpiece transfer between the pod and process tool. The system includes a latch key protruding outwardly from the outer surface of the port door. The latch key is provided to mate within a slot of a door latch assembly within the pod door. Once the latch key is properly seated within the slot, the latch key is rotated by mechanisms within the port door to decouple the pod door from the pod shell. Such rotation at the same time couples the pod door to the port door. According to the present invention, while the latch key rotates, it simultaneously moves in the rearward direction (i.e., back toward the port door) to thereby pull the pod door into a tight engagement with the port door.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.