Ink jet recording head, method for manufacturing the same, and ink jet recorder
US6502930B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 4, 2001 |
| Grant date | Jan 7, 2003 |
| Priority date | — |
| Expiry date | Apr 4, 2021 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2202/13
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
Disclosed are an ink-jet recording head, in which the rigidity of the compartment wall is improved, pressure generating chambers can be arranged in a high density, and cross talk between the pressure generating chambers is reduced, and a manufacturing method of the same and an ink-jet recording apparatus. In an ink-jet recording head including a passage-forming substrate (10) having a silicon layer consisting of single crystal silicon, in which a pressure generating chamber (15) communicating with a nozzle orifice is defined; and a piezoelectric element (300) for generating a pressure change in the pressure generating chamber, the piezoelectric element being provided on a region facing the pressure generating chamber (15) via a vibration plate constituting a part of the pressure generating chamber (15), the pressure generating chamber (15) is formed so as to open to one surface of the passage-forming substrate (10) and not to penetrate therethrough, at least a bottom surface of inner surfaces of the pressure generating chamber (15), which is facing to the one surface, is constituted of an etching stop surface as a surface in which anisotropic etching stops, and the piezoelectric el…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.