Micro-machined thermo-conductivity detector
US6502983B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 30, 1999 |
| Grant date | Jan 7, 2003 |
| Priority date | — |
| Expiry date | Apr 1, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N30/66
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micro-machined thermal conductivity detector for a portable gas chromatograph. The detector is highly sensitive and has fast response time to enable detection of the small size gas samples in a portable gas chromatograph which are in the order of nanoliters. The high sensitivity and fast response time are achieved through micro-machined devices composed of a nickel wire, for example, on a silicon nitride window formed in a silicon member and about a millimeter square in size. In addition to operating as a thermal conductivity detector, the silicon nitride window with a micro-machined wire therein of the device can be utilized for a fast response heater for PCR applications.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.