Microfabricated double-throw relay with multimorph actuator and electrostatic latch mechanism

US6504118B2 · kind B2 · utility

Inventors

• Daniel Hyman · Irvine, US
• Mark Hyman · Waltham, US
• Peter Bogdanoff · Berlin, DE

Key dates

• Filing date: Oct 29, 2001
• Grant date: Jan 7, 2003
• Expiry date: Oct 29, 2021

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01H2061/006
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

This invention is a new type of relay that incorporates the functional combination of multimorph actuator elements with electrostatic state holding mechanisms in the development of a micromachined switching device. This combination of elements provides the benefits of high-force multimorph actuators with those of zero-power electrostatic capacitive latching in microfabricated relays with high reliability and low power consumption. The operation of the relay invention allows for several stable states for the device: a passive state using no power, an active state driving the multimorph actuator with some power, and a latched state electrostatically holding the switch state requiring essentially no power. Multimorph actuators covered by this invention include piezoelectric, thermal, and buckling multimorph actuation mechanisms. These devices use one or more sets of actuator armatures in cantilever or fixed-beam configurations, and use one or more sets of electrostatic latch electrodes for state holding.