Application of variable bias voltage on a cylindrical grid enclosing a target
US6504307B1 · kind B1 · utility
39Cited by
7References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 30, 2000 |
| Grant date | Jan 7, 2003 |
| Priority date | — |
| Expiry date | Nov 30, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3266
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An apparatus and methods for modifying a surface of a target. The apparatus includes a reaction vessel having a reaction chamber. A cylindrical or spherical grid is positioned within the chamber. An electrode is also positioned within the chamber. A target can be positioned within the chamber and within the grid. A voltage source is operatively associated with the target and with the grid to separately but concurrently provide an independently variable voltage to both the grid and the electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.