Microelectricalmechanical device immobilization and sealing
US6504685B1 · kind B1 · utility
5Cited by
1References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 8, 2000 |
| Grant date | Jan 7, 2003 |
| Priority date | — |
| Expiry date | Dec 26, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B5/56
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A microelectromechanical (MEM) device with an expanded PTFE material over the gap between movable structures to provide electrical connection across the gap and prevent particles from contaminating the gap. A microelectromechanical (MEM) device is also immobilized by placing an expanded PTFE material over the gap between movable structures. The expanded PTFE material can be made stiff during manufacture and then flexible after the manufacturing process is complete. An embodiment of the invention is a MEM device configured as a micro-actuator for a dual-actuator hard disk drive.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.