Optical waveguide and method for fabricating the same
US6504983B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 30, 2001 |
| Grant date | Jan 7, 2003 |
| Priority date | — |
| Expiry date | Jul 10, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P40/57
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The crosstalk characteristics of an arrayed waveguide grating or the like are improved. One or more of substrates are placed at a circumferential position centering the table rotational center C on a turntable that rotates at a constant angular speed of rotation &ohgr; and the turntable is rotated. A burner is moved to and fro in the radial direction of the turntable between positions r1 and r2 in the radial direction of the turntable and is reciprocated across the substrates. A material gas of glass, an oxygen gas and a hydrogen gas are passed through the burner to generate a hydrolysis reaction of the material gas in a hydrogen oxygen flame and an under cladding glass particle, a core glass particle and an over cladding particle are sequentially deposited on the substrates to form an optical waveguide part. The rotation velocity r1&ohgr; of the turntable at the position r1 is set 600 mm/sec or above at least in the step of depositing the core glass particle among the steps of depositing the under cladding glass particle, the core glass particle and the over cladding particle.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.