Micromachined gyros
US6505511B1 · kind B1 · utility
82Cited by
26References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 25, 2000 |
| Grant date | Jan 14, 2003 |
| Priority date | — |
| Expiry date | Aug 25, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5719
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micromachined gyroscope has first and second coplanar bodies suspended over a substrate and movable in their plane relative to the substrate. The first body is dithered along a dither axis and is movable relative to the second body on the dither axis, but is rigidly connected for movement along an axis transverse to the dither axis. The second body is anchored so that it is substantially inhibited from moving along the dither axis, but can move with the first body along the transverse axis. The gyro has stop members and an anti-levitation system for preventing failure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.