Patent · US Expired

Micromachined devices and connections over a substrate

US6505512B2 · kind B2 · utility

3Cited by
27References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 17, 2001
Grant dateJan 14, 2003
Priority date—
Expiry dateDec 17, 2021

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01C19/5719
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A micromachined gyroscope has first and second coplanar bodies suspended over a substrate and movable in their plane relative to the substrate. The first body is dithered along a dither axis and is movable relative to the second body on the dither axis, but is rigidly connected for movement along an axis transverse to the dither axis. The second body is anchored so that it is substantially inhibited from moving along the dither axis, but can move with the first body along the transverse axis. The gyro has stop members and an anti-levitation system for preventing failure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.