Capacitive pressure sensing with moving dielectric
US6505516B1 · kind B1 · utility
29Cited by
169References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 6, 2000 |
| Grant date | Jan 14, 2003 |
| Priority date | — |
| Expiry date | Jan 6, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0072
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor with a diaphragm that has a dielectric portion that moves in a cavity near capacitor plates that are fixed relative to a mounting frame. The diaphragm is supported on the frame and the frame surrounds the cavity. The diaphragm has an outer surface that receives pressure and has an inner surface facing the cavity. The capacitor plates, which are fixed, sense movement of the nearby dielectric portion and generate an electrical output representative of pressure. Creep of metallizations on a flexible diaphragm are avoided. Manufacture is simplified because metallization of the diaphragm is avoided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.