Foil pressure sensor which can be tested

US6505521B1 · kind B1 · utility

Assignees

• Daimlerchrysler AG · US
• I.E.E. - International Electronics S.a.r.L. · LU

Inventors

• Volker Petri · Aidlingen, DE
• Reinhold Mickeler · Altdorf, DE
• Michael Meyer · Altdorf, DE
• Bogdan-Catalin Serban · Bucharest, RO
• Michel Witte · Luxembourg, LU

Key dates

• Filing date: Sep 8, 1997
• Grant date: Jan 14, 2003
• Expiry date: Sep 8, 2017

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L1/20
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention provides a testable foil pressure sensor constructed of two carrier foils which are laminated together. The first carrier foil is coated with a semiconductor material, while the second carrier foil has two adjacent strip conductors which can each be bonded on both ends and which, within spatially bounded areas which form sensor elements, have “comb” structures, with individual fingers which mesh with one another in a no-contact manner. According to the invention, within a sensor element, at least one of the contact fingers of the comb structure is formed by a strip conductor loop and at least one other contact finger is formed by a stub line branching off a strip conductor.