Microactuator based on diamond

US6505914B2 · kind B2 · utility

Assignee

• Merckle GmbH · DE

Inventors

• Eberhard P. Hofer · Lonsee, DE
• Erhard Kohn · Blaustein, DE
• Christian Rembe · Waldbronn, DE
• Stefan Aus Der Wiesche · Ulm, DE
• Peter Gluche · Ulm, DE
• Rudiger Leuner · Neu-Ulm, DE

Key dates

• Filing date: Dec 4, 2001
• Grant date: Jan 14, 2003
• Expiry date: Dec 4, 2021

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D1/47
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

The invention relates to a microactuator arranged on a thermally insulating layer (2) and having a resistance layer (4) made from doped diamond, which is provided with an electrical supply and an electrical leakage (9).