Near-field optical inspection apparatus
US6507017B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 16, 2001 |
| Grant date | Jan 14, 2003 |
| Priority date | — |
| Expiry date | May 16, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/862
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus (1) for optical inspection of an article(s) is presented. The apparatus utilizes near-field illumination, and comprises a light source unit (4) generating incident light, a detector unit (14), a fiber bundle for directing (16C) the incident light onto a substantially large surface area (2A) of the article and collecting light (16B) returned from the illuminated surface area, and a control means (28). The control means comprises sensing means consisting of at least three tips for atomic force (AFM) or current tunneling (STM) measurement at sample surface, and is capable of adjusting the position of the fiber bundle relative to the surface of the article.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.