Image sensor with light-reflecting via structures
US6507083B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 5, 2000 |
| Grant date | Jan 14, 2003 |
| Priority date | — |
| Expiry date | Nov 30, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/8057
Abstract
An image sensor has a light-shielding layer with openings corresponding to an array of light-sensing elements formed below on a substrate. Light-reflecting material is applied to form (e.g., vertical) via walls between each opening in the light-shielding layer and the corresponding light-sensing element. Light having a non-normal angle of incidence will reflect off the vertical light-reflecting via structures towards the light-sensing elements. As such, substantially all of the light that passes through an opening in the light-shielding layer will reach the light-sensing element, even light incident at relatively low angles, thereby reducing the problem of pixel vignetting associated with prior art image sensors. As a result, the image sensor has a greater and more uniform sensitivity across the entire sensor array.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.