Capacitive device and method of manufacture
US6507475B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 27, 2000 |
| Grant date | Jan 14, 2003 |
| Priority date | — |
| Expiry date | Jun 27, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01G5/18
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A capacitive device includes a substrate (110), a first electrode (130, 140, 1220) located over the substrate and a second electrode (170, 1070, 1071, 1250) located over the first electrode, movable relative to the first electrode, and capacitively coupled to the first electrode. The device further includes a first control electrode (120, 150, 1210) located over the substrate and a second control electrode (160, 180, 1060, 1061, 1080, 1081, 1240) located over the first control electrode, movable relative to the first control electrode, and capacitively coupled to the first control electrode. The first and second control electrodes actuate the second electrode toward the first electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.