Method of making tunable thin film acoustic resonators
US6507983B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 13, 1998 |
| Grant date | Jan 21, 2003 |
| Priority date | — |
| Expiry date | Nov 13, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An acoustical resonator comprising top and bottom electrodes that sandwich a PZ layer. The resonance frequency of the acoustical resonator may be adjusted after fabrication by utilizing heating elements included in the acoustical resonator and/or by adjusting the thickness of a tuning layer. In the preferred embodiment of the present invention, the electrodes comprise Mo layers. One embodiment of the present invention is constructed on a Si3N4 membrane. A second embodiment of the present invention is constructed such that it is suspended over a substrate on metallic columns. In the preferred embodiment, the electrodes are deposited by a method that minimizes the stress in the electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.