Pressure sensor capsule with improved isolation
US6508129B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 6, 2000 |
| Grant date | Jan 21, 2003 |
| Priority date | — |
| Expiry date | Jan 6, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/0681
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor capsule with a beam shaped sensor body, made of direct bonded layers of single crystal sapphire, surrounding a hollow central channel. A first beam end receives pressure and a second beam end has electrical contact pads and there is a mounting surface between the ends. The central channel has a narrower width passing through the mounting surface. An isolation plate is brazed to the mounting surface. Pressure sensing film is in the first end with leads extending through the channel to the electrical contact pads. The beam having a notch at the second end, forming an isolated lead surface on the central channel where the electrical contact pads are accessible.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.