Patent · US Expired

Method for measuring the distance between a sensor electrode and a workpiece

US6509744B1 · kind B1 · utility

9Cited by

1References

10Claims

0Family size

Assignee

PRECITEC GMBH & CO. · DE

Inventors

Stephan Biermann · Gernsbach, DE
Georg Spörl · Rheinstetten, DE

Key dates

Filing date	Feb 16, 2000
Grant date	Jan 21, 2003
Priority date	—
Expiry date	Feb 16, 2020

Classification

Technology area (CPC G)Physics
CPC primaryG01B7/023
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The invention relates to a method and a device for measuring the distance between a sensor electrode and a workpiece. The sensor electrode forms, with the workpiece, a measuring capacitor through which an alternating current flows. A voltage present at the sensor electrode is tapped as a measuring voltage. In order to be able to remove the disturbing influence on the impedance of the measuring capacitor of a plasma forming between the sensor electrode and workpiece, the real part and the imaginary part from the measuring voltage are analyzed and used to determine the distance between the sensor electrode and the workpiece.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.