Purification of carbon dioxide
US6511528B1 · kind B1 · utility
20Cited by
28References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 14, 2000 |
| Grant date | Jan 28, 2003 |
| Priority date | — |
| Expiry date | Feb 14, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S95/902
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Commonly available carbon dioxide may contain unacceptable amounts of compounds containing greater than about ten carbon atoms, sulfur-containing materials, and nitrogen-containing materials which are particularly detrimental to semiconductor and silicon wafer processing-related uses of carbon dioxide. These impurities can be effectively removed by a combination of metal oxide, silica gel, and activated carbon, thus permitting an on-site, on-demand, convenient, and economic method of purifying carbon dioxide ranging from laboratory scale operations to tank car scale operations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.