Holding device

US6511543B1 · kind B1 · utility

Assignee

• Unaxis Balzers Aktiengesellschaft · LI

Inventors

• Peter Stauss · Regensburg, DE
• Jorg Kerschbaumer · Feldkirch, AT

Key dates

• Filing date: Aug 24, 2000
• Grant date: Jan 28, 2003
• Expiry date: Aug 24, 2020

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/68721
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A holding device for a vacuum unit has a lifting table transferable between a lower end position and an upper end position for moving a support plate toward the underside of a disc-shaped workpiece. The workpiece is supported by a support ring carrying centring pins spaced to form an equilateral triangle, in the center of which the axis of the support plate is located. A clamping ring clamps the workpiece with the support ring. The centring pins engage the clamping ring to center the support ring and clamping ring relative to the support plate axis so they are not affected by thermal expansion.