Method for manufacturing a thermopile on an electrically insulating substrate

US6511860B1 · kind B1 · utility

Assignee

• BERKIN B.V. · NL

Inventors

• Hendrik Jan Boer · Lochem, NL
• Frederik Van Der Graaf · Zuidland, NL
• Boudewijn Martinus · Rosmalen, NL

Key dates

• Filing date: Jul 24, 2000
• Grant date: Jan 28, 2003
• Expiry date: Dec 27, 2020

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10N10/01

Abstract

Method for manufacturing a thermopile on an electrically insulating substrate. A pattern is arranged on this substrate of parts which consist of a first conductive material, to which a second conductive material is applied, and parts which consist only of the first conductive material. The second material is better electrically conducting than the first and, connected as thermopile, can thereby generate a certain thermo-voltage. The second material is applied to the first, starting from a layer of the first material on the substrate, by etching stripes therein via the so-called “blind-hole etching” technique and applying the second material in these stripes.