Patent · US Expired

Thin film transistors with self-aligned transparent pixel electrode

US6511869B2 · kind B2 · utility

6Cited by
8References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 5, 2000
Grant dateJan 28, 2003
Priority date
Expiry dateDec 5, 2020

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02F1/1368
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A pixel cell has a thin film transistor structure formed on a substrate. A signal conductor is patterned on the thin film transistor structure, and a first patterned layer of a transparent conductive material covers the signal conductor. The first patterned layer provides a pattern employed in etching a channel region of the thin film transistor structure. A dielectric layer is formed over the pixel cell and includes a via hole down to the first patterned layer of the transparent conductive material. A second layer of transparent conductive material extends through the via hole to contact the first patterned layer wherein the second layer is self-aligned to the transistor structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.