Nanotube-based electron emission device and systems using the same
US6512235B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 1, 2000 |
| Grant date | Jan 28, 2003 |
| Priority date | — |
| Expiry date | May 1, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/939
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device that produces an electron beam with high optical quality for processing a sample, is presented. The optical quality is manifested by very high brightness and low energy spread. The device includes an electron source device comprising an electrode in the form of a shaped first layer, preferably in the form of a conducting crater carrying at least one nanotube, and an extracting electrode, which is formed with at least one aperture and is insulated from the firs layer. The source can be used in any column that requires such properties. The column according to the invention may be a full size or a miniature electron microscope, a lithography tool, a tool used for direct writing of wafers or a field emission display.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.