Micromechanical precision silicon scale
US6513388B1 · kind B1 · utility
3Cited by
9References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 21, 2000 |
| Grant date | Feb 4, 2003 |
| Priority date | — |
| Expiry date | Dec 21, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01G7/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention concerns a silicon micromechanical weight sensor (26). According to the invention, the weight sensor comprises at least two conducting electrodes (2, 15) displaced at a distance from each other, whereby one of the elastically suspended electrode surfaces (2) or, alternatively, a structure connected thereto, acts as the pan surface of the weight sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.