Controlling the thickness of an organic layer in an organic light-emiting device
US6513451B2 · kind B2 · utility
18Cited by
20References
32Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 20, 2001 |
| Grant date | Feb 4, 2003 |
| Priority date | — |
| Expiry date | Jul 25, 2021 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/12
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Apparatus for monitoring and controlling formation of organic layers by physical vapor deposition of organic materials in making organic light-emitting devices is disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.