Patent · US Expired

Array of ultrasound transducers

US6515402B2 · kind B2 · utility

18Cited by
13References
2Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 24, 2001
Grant dateFeb 4, 2003
Priority date
Expiry dateJan 24, 2021

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10N30/8554
  • WIPO fieldChemical engineering
  • WIPO sectorChemistry

Abstract

The invention relates to an array of ultrasound transducers which each comprise a substrate (1), a membrane (2), a first electrode (4), a piezoelectric layer (5), and a second electrode (6), wherein the substrate (1) comprises at least one opening (3) which adjoins the membrane (2) at one side, while the piezoelectric layer (5) has a high piezoelectric coupling coefficient k and is textured. The invention further relates to an ultrasound transducer and to a method of manufacturing an array of ultrasound transducers.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.