Interferometric system for and method of testing and characterizing micro-optic components
US6515750B1 · kind B1 · utility
10Cited by
1References
33Claims
0Family size
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Key dates
| Filing date | Mar 3, 2000 |
| Grant date | Feb 4, 2003 |
| Priority date | — |
| Expiry date | Mar 3, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B9/02068
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Three aspect of a interferometer system for testing and characterizing micro-optical components an automatic system for testing a plurality of micro-optical components in sequence, a special holding device including a vacuum chuck arrangement allows for individual micro-optical components to be picked up and held during testing, and a modified Linnik objective is used with short coherent light and preferably a opaque reference sphere to carry out reflection tests on micro-optical component having at least one curved surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.