Semiconductor factory automation system and method for transporting semiconductor wafers
US6516238B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 22, 2000 |
| Grant date | Feb 4, 2003 |
| Priority date | — |
| Expiry date | May 22, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/60
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method for transporting semiconductor wafers in semiconductor factory automation system, includes the steps of: a) processing a lot of semiconductor wafers to be contained in a semiconductor wafer cassette in a process equipment; b) sending a cassette transportation request from the process equipment to a cell management server when the process equipment has processed the lot of semiconductor wafers; c) generating a transportation instruction in response to the cassette transportation request; and d) if the semiconductor wafer cassette is transported from the process equipment to a stocker by an automatic guide vehicle (AGV), simultaneously activating the AGV and the stocker by simultaneously sending the transportation instruction to the AGV and the stocker. The method in accordance with the present invention can reduce a time taken to transport the semiconductor wafers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.