Scanning single electron transistor microscope for imaging ambient temperature objects
US6516281B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 10, 1999 |
| Grant date | Feb 4, 2003 |
| Priority date | — |
| Expiry date | Dec 10, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/318513
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system, method, and computer program product are provided for scanning objects such as computer chips. A near-field scanning Single Electron Transistor (SET) is used to detect features of the object. In particular, the SET detects variations in an electric field surrounding or emanating from the object. The variation in the field may be associated with an irregularity in the object, such as an open in the circuitry of a chip. In the case of a chip or a multi-chip module, a voltage is applied to the line containing the suspected open. If an actual open is present, the open will be manifested in an irregularity in the electric field associated with the line. The SET detects the irregularity in the field. For the SET to operate, a sufficiently cold operating temperature is maintained for the SET. A very low (cryogenic) temperature allows the use of a larger, more sensitive SET. Scanning SETs are known in the literature, but in such systems the object to be scanned must also be at cryogenic temperatures. In the invention described herein, the object to be scanned can be left at a temperature in its normal environmental temperature range. This temperature range is referred to hereinaf…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.