Apparatus for purification of electronic specialty gases by vapor phase transfilling

US6517686B2 · kind B2 · utility

Assignees

• L'Air Liquide, Société Anonyme à Directoire et Conseil de Surveillance pour l'Étude et l'Exploitation des Procédés Georges Claude · FR
• American Air Liquide, Inc. · US
• Air Liquide America Corporation · US

Inventors

• John Borzio · Lawrence, US
• Tracey Jacksier · Lisle, US

Key dates

• Filing date: Mar 13, 2001
• Grant date: Feb 11, 2003
• Expiry date: Mar 13, 2021

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C01C1/024
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

A system and method for purifying liquefied corrosive gases of metallic impurities is described. The principle for this purification method relies on vapor-phase transfilling the vapor phase from a source container into a receiving container. This method has been observed to decrease metal concentrations by a factor of at least 1000 and, decreases the metallic impurity levels in the resulting condensate. The vapor transfer is accomplished by controlled differential pressure rather than mechanical pumping, thereby generating no particle or metal impurities.