Production of an integrated optical device
US6517997B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | May 26, 2000 |
| Grant date | Feb 11, 2003 |
| Priority date | — |
| Expiry date | May 26, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/13
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of manufacturing an integrated optical device on a substrate is described wherein the device comprises first and second areas each containing at least one optical component. The first and second areas are separated by a third relatively featureless area, which provides optical communication between the first and second areas. The method uses a photolithographic stepper to define features of the optical components in the first area within a first exposure field and the features of the optical component(s) in the second area within a second exposure field, the stepper being moved between exposures so that first and second exposure fields are contiguous, and a line of contact or area of overlap between the first and second fields lies within the third, relatively featureless area of the substrate. The method may be used to form an arrayed waveguide grating with input waveguides within a first field, an array of curved waveguides in a second field and output waveguides in a third field, the fields overlapping in relatively featureless areas between the respective waveguide components.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.