Method of fabricating a submicron narrow writer pole
US6521335B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 2, 1999 |
| Grant date | Feb 18, 2003 |
| Priority date | — |
| Expiry date | Mar 2, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/265
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A writer pole and a method for fabricating a writer pole is disclosed. The method comprises fabricating a conductive seed layer on a gap substrate and then fabricating a nonmagnetic feature on the seed layer where the nonmagnetic feature has a top layer and a plurality of sides. The seed layer and nonmagnetic feature are covered with photoresist. A window is fabricated in the photoresist, exposing a portion of the nonmagnetic feature and a portion of the seed layer, thereby exposing a top portion and a side portion of the nonmagnetic feature and exposing a portion of the seed layer. The portion of the seed layer in the window area is removed from the gap substrate. A pole is fabricated on the top and side portions of the nonmagnetic feature in the window area.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.