Organozirconium compound, organic solution comprising same, and zirconium-containing thin film therefrom
US6521770B2 · kind B2 · utility
2Cited by
4References
15Claims
0Family size
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Key dates
| Filing date | Apr 23, 2001 |
| Grant date | Feb 18, 2003 |
| Priority date | — |
| Expiry date | May 17, 2021 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB32B9/00
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An organozirconium compound comprises zirconium complexed with a &bgr;-diketone compound and an alkoxy group having a branched alkyl group, and which has formula (1): wherein R is a branched alkyl group having 4 or 5 carbons; and L1, L2, and L3, the same or different from each other, are each a &bgr;-diketone compound.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.