Process and switching arrangement for pulsing energy introduction into magnetron discharges

US6522076B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Klaus Goedicke · Dresden, DE
• Torsten Winkler · Radeberg, DE
• Michael Jungh{overscore (a)}hnel · Dresden, DE
• Karsten Handt · Starnberg, DE
• Henry Güldner · Heidenau, DE
• Henrik Wolf · Kassel, DE
• Frank Eckholz · Dresden, DE

Key dates

• Filing date: Mar 27, 2001
• Grant date: Feb 18, 2003
• Expiry date: Mar 27, 2021

Classification

• Technology area (CPC H): Electricity
• CPC primary: H05H1/46
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

Process and control arrangement for introducing pulsing energy introduction into magnetron discharges. The process includes feeding a charge to the electrodes of a magnetron arrangement via a ignition source at a time t0, and, after the feeding of the electric charge, determining an ignition of the magnetron discharge. The process also includes introducing a current, having a predetermined value, from a boost source at a time t1, and, at a time t2, separating the ignition source from the electrodes of the magnetron arrangement. The introduction of the current by the boost source continues for a certain duration tEIN. The process also includes interrupting the introduction of the electric energy for a predetermined time tAUS.