Interference lithography using holey fibers
US6522433B2 · kind B2 · utility
10Cited by
4References
42Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 4, 2001 |
| Grant date | Feb 18, 2003 |
| Priority date | — |
| Expiry date | Apr 4, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/90
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method and apparatus for interference lithography utilize a fiber having a cladding region with axially formed holes surrounding a core region. The fiber emits an optical signal to perform interference lithography. A number of alternative variations in the size and arrangement of axially formed holes produces fibers having characteristics particularly adapted for receiving, communicating, and emitting optical signals for interference lithography.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.