Micro-electro-optical mechanical device having an implanted dopant included therein and a method of manufacture therefor
US6522801B1 · kind B1 · utility
74Cited by
7References
59Claims
0Family size
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Key dates
| Filing date | Oct 10, 2000 |
| Grant date | Feb 18, 2003 |
| Priority date | — |
| Expiry date | Oct 10, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12104
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention provides a micro-electro-mechanical system (MEMS) optical device. The micro-electro-mechanical system (MEMS) optical device includes a mirror having a substrate with an implanted light reflective optical layer thereover, and a mounting substrate on which the mirror is movably mounted. The inclusion of the dopant within the light reflective optical layer increases the tensile stress of the device and tends to correct the concave curvature of the mirror structure toward a desirably flat configuration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.