Angular rate sensor
US6523410B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 9, 2001 |
| Grant date | Feb 25, 2003 |
| Priority date | — |
| Expiry date | Oct 9, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5607
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An object of the present invention is to improve the efficiency of a driving operation of an angular rate sensor employing a tuning fork oscillator made of single crystalline piezoelectric material such as quartz. In order to achieve the object of the present invention, a tuning fork oscillator assembled directly has driver electrodes and detector electrodes provided on a first main surface, a second main surface, an outer surface, and an inner surface of a arm, respectively. The oscillator also has a driver electrode, a monitor electrode, and detector electrodes provided on a first main surface, a second main surface, an inner surface, and an outer surface of the other arm thereof, respectively. A driving voltage is supplied from a driving power source so that the two driver electrodes may be equal in the polarity while the polarity of the driver electrode is opposite to that of the driver electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.