Elongated rib for cassette and substrate cassette
US6523701B1 · kind B1 · utility
Assignees
Inventors
Key dates
| Filing date | Sep 6, 2000 |
| Grant date | Feb 25, 2003 |
| Priority date | — |
| Expiry date | Sep 6, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67343
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A cassette for supporting substrates and an elongated rib therefor is described and represents a further improvement in the previously proposed elongated rib systems of the prior art and is designed particularly to preclude deflection and dampen vibrations of loaded substrates. The elongated ribs for the cassette project from side panels utilizing an elongated rib structure including three segments; namely, a base resin body, a bar-like intermediate resin body extending from the base resin body, and a terminal resin body disposed at the forward end of the intermediate resin body. Preferably, the elongated rib structure includes a linearreinforcing member inserted fromthe base resin body to the intermediate resin body or, alternatively, from the base resin body through the intermediate resin body to the terminal resin body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.