Integrated optical interrogation of micro-structures
US6525307B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 16, 1999 |
| Grant date | Feb 25, 2003 |
| Priority date | — |
| Expiry date | Sep 16, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B7/34
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention is an integrated optical sensing element for detecting and measuring changes in position or deflection. A deflectable member, such as a microcantilever, is configured to receive a light beam. A waveguide, such as an optical waveguide or an optical fiber, is positioned to redirect light towards the deflectable member. The waveguide can be incorporated into the deflectable member or disposed adjacent to the deflectable member. Means for measuring the extent of position change or deflection of the deflectable member by receiving the light beam from the deflectable member, such as a photodetector or interferometer, receives the reflected light beam from the deflectable member. Changes in the light beam are correlated to the changes in position or deflection of the deflectable member. A plurality of deflectable members can be arranged in a matrix or an array to provide one or two-dimensional imaging or sensing capabilities.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.