Patent · US Expired

Ball grid array (BGA) package on-line non-contact inspection method and system

US6525331B1 · kind B1 · utility

22Cited by
12References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 1, 1999
Grant dateFeb 25, 2003
Priority date
Expiry dateDec 1, 2019

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N21/8806
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A method and apparatus is disclosed for non-contact, on-line inspection of objects including a ball grid array package by means of a shadow moiré technique combined with a novel flash phase-shifting method. The grid pitch size, ball height, ball diameter, missing ball, coplananity can be determined or measured within several seconds. The apparatus includes a camera for viewing the object, a plurality of light sources arranged in a line for illuminating the object to be inspected, a frame grabber for capturing images of the object, an I/O adapter card for controlling the light sources and a personal computer for data processing. The individual components are integrated into system which provides a three dimensional map which is obtained quantitatively using a novel algorithm. The system can provide coplananity data, as well as data relating to grid pitch, ball height, ball diameter, and missing ball information.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.