Integrated mirror array and circuit device
US6525864B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 25, 2001 |
| Grant date | Feb 25, 2003 |
| Priority date | — |
| Expiry date | Jan 27, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04Q2011/0039
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An integrated circuit and mirror device. The device includes a first substrate comprising a plurality of electrode groups, wherein each of the groups comprises a plurality of electrodes. A mirror array is formed on a second substrate. Each of the mirrors on the array has a mirror surface being able to pivot about a point (e.g., fixed point, region) in space. Each of the mirrors has a backside surface operably coupled to one of the electrode groups. A bonding layer mechanically couples the first substrate to the second substrate, whereupon the backside surface of each mirror faces one of the electrode groups. The device also has a drive circuitry coupled to each electrode groups. The drive circuitry is configured to apply a voltage to any one of the electrodes in each of the electrode groups. The drive circuitry is disposed in the first substrate and being adapted to pivot each of the mirror faces about the point in space.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.