Optical beam splitter that can be manufactured by micromechanical means
US6525884B2 · kind B2 · utility
5Cited by
7References
44Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 15, 2001 |
| Grant date | Feb 25, 2003 |
| Priority date | — |
| Expiry date | Mar 15, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/1073
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A beam splitter has a support frame made of silicon that has a membrane inside made of silicon. The membrane has in particular openings with bridges formed between them. On the side of membrane facing the incident beam is an aluminum coating to increase the reflectability or degree of reflection of the membrane. An incident beam bundle contacts the beam splitter at angle of incidence &phgr;. A portion of the incident beam is reflected off the bridges, and the remaining portion of the beam freely passes through the openings. The beam is correspondingly divided into a reflective portion and transmitted portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.