High purity chemical container with external level sensor and liquid sump
US6526824B2 · kind B2 · utility
46Cited by
15References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 7, 2001 |
| Grant date | Mar 4, 2003 |
| Priority date | — |
| Expiry date | Jul 26, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F23/2961
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A container for high purity chemicals having an externally placed level sensor to avoid contamination of such chemical and for ready serviceability and a removeable liquid out diptube to facilitate cleaning during refilling or refurbishing, both of which are situated adjacent a sump in the bottom of the container. The container can have a valved inlet and outlet and can be constructed of stainless steel which is electropolished.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.