Substrate processing apparatus having pressed together supply rolls
US6527028B2 · kind B2 · utility
17Cited by
40References
28Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 1, 2001 |
| Grant date | Mar 4, 2003 |
| Priority date | — |
| Expiry date | Oct 1, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/1741
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The present application discloses a substrate processing apparatus having a pair of pressed together supply rolls for applying pressure to perform the processing operation. The present application also discloses a method for processing a substrate wherein a pair of supply rolls are pressed together.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.