Piezo actuator with multi-layer conductive film, and method for making same

US6528927B1 · kind B1 · utility

Assignee

• Siemens Aktiengesellschaft · DE

Inventors

• Carsten Schuh · Baldham, DE
• Karl Lubitz · Ottobrunn, DE
• Dieter Cramer · Graz, AT
• Thorsten Steinkopff · Eglharting, DE
• Iris Hahn · Neubiberg, DE
• Andreas Wolff · Munich, DE
• Clemens Scherer · Gilching, DE

Key dates

• Filing date: Jun 29, 2000
• Grant date: Mar 4, 2003
• Expiry date: Jun 29, 2020

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10N30/067

Abstract

A piezo actuator with an actuator body has at least one electrically conductive multi-layer film with a rigid electrical terminal element. The multi-layer film controls expansion and attraction of the actuator body. An electrical conduction layer of the multi-layer film has at least one recess to increase flexibility. The recesses in the conduction layer are, for example, photolitho-graphically produced.