Patent · US Expired

Surface emitting semiconductor laser

US6529541B1 · kind B1 · utility

43Cited by
3References
21Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 20, 2000
Grant dateMar 4, 2003
Priority date
Expiry dateApr 18, 2021

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01S2301/166
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A surface emitting semiconductor laser that is easy to manufacture and has a high-intensity fundamental lateral mode optical output power. The surface emitting semiconductor laser has a semiconductor substrate on which are sequentially laminated a lower n-type DBR layer, an active layer region, an upper p-type DBR layer, a p-side electrode that is an upper layer of the upper n-type DBR layer and functions as an upper electrode provided with an aperture that forms an emission region for a laser beam, and a current confinement portion formed by oxidization. On the basis of the reflectance of a cavity in a region corresponding to the p-side electrode, a metal aperture diameter (Wmetal) of the aperture and a diameter (Woxide) of the current confinement portion are determined such that the difference between an optical loss of a cavity in a higher-order lateral mode of a laser beam and an optical loss of a cavity in a fundamental lateral mode of a laser beam becomes larger.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.