Patent · US Expired

Waveguide tunable Bragg grating using compliant microelectromechanical system (MEMS) technology

US6529659B2 · kind B2 · utility

5Cited by
4References
5Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 11, 2001
Grant dateMar 4, 2003
Priority date
Expiry dateJun 26, 2021

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B2006/12069
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A low cost waveguide tunable Bragg grating provides a flat passband and minimal crosstalk. A compliant material forms a waveguide that is imprinted with a Bragg grating and mounted on a MEMS actuator. Entropic materials such as elastomers, aerogels or other long-chain polymers may provide the necessary compliance. The application of a drive signal to the actuator deforms (squeezes or stretches) the compliant material thereby changing the Bragg spacing and shifting the resonant wavelength. The MEMS actuator can be an electrostatically or electromagnetically actuated comb-drive.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.